Scanning electron microscope (Zeiss EVO MA 25) with EDX and EBSD
The large chamber scanning electron microscope is a high performance instrument with a resolution of up to 2.0 nm. It allows quick statements to be made in a simple manner about the composition and morphology of the surfaces of specimens up to a size of 400 mm and a weight of 5 kg. By means of the low vacuum mode, even non-conductive samples can be analyzed without sputtering.
The picture shows a bonded coating on a plastic sample after a cross-cut test. The so-called “eggshell effect” of the coating is clearly visible.
In addition, the connected modern EDX system allows analytical investigations in micro-areas of the surface. Combined with crystal analysis (EBSD), both chemical and structural analyses are thus possible.
| Device parameters | |
| Cathode | LaB 6 or tungsten |
| Resolution | 2.0 nm at 30 kV; 12 nm at 1 kV (UHV) |
| Magnification | 5-fold to 1,000,000-fold (for technical samples max. 40,000-fold) |
| Pressure range | High vacuum or variable pressure 10 to 400 Pa |
| Specimen size / weight | D up to max. 400 mm / 5 kg |
| Sample height | max. 210 mm |
| Rehearsal stage | 5 axes fully motorized |
| EDX / EBSD | EDAX Pegasus XM2 |
| Software options | Particle analysis, texture analysis |